Statistics
Publications
1
Citations
104
H-Index
1
Active since
1987
Affiliations
Siemens (Germany)(Current)
H. Anzinger is an author at Siemens (Germany) specializing in semiconductor materials, thin oxide films, and etching processes.
Publications per year
1987–1987
1
1
Low-pressure deposition of high-quality SiO2 films by pyrolysis of tetraethylorthosilicate
Frank Becker, D. A. Pawlik, H. Anzinger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 104 citations
Natural Sciences, Materials Engineering, Materials Science +16
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