Calibration of Non Linear Properties of Pb(Zr, Ti)O₃Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy

Abstract

A piezoresistive sensor was integrated in a self-actuating Pb(Zr, Ti)O3 (PZT) cantilever to calibrate hysteresis and creep phenomena of a PZT actuator for high speed atomic force microscopy. The fabricated PZT cantilevers provided high tip displacement of 0.37 µm/V and high resonant frequency of 85 kHz. The hysteresis of the PZT cantilever was well calibrated using the integrated piezoresistive sensor. The creep phenomenon of the PZT cantilever is solved by the piezoresistive sensor. The self-actuating PZT cantilever showed a good image at a high scan speed of 1 mm/s.