Concepedia

Moisture barrier properties of plasma enhanced chemical vapor deposited SiCxNy films on polyethylene naphthalate sheets and epoxy molding compound

G. Kaltenpoth, Walter Siebert, Frank Stubhan, Xuhong Wang, Le Luo

Surface and Coatings Technology · 2002 · 24 citations · 13 references

DOI

Concepts

References

13

Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers

W. A. P. Claassen, W. G. J. N. Valkenburg, M. F. C. Willemsen et al. · Journal of The Electrochemical Society · 1985 · 191 citations

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Crystalline silicon carbon nitride: A wide band gap semiconductor

Li–Chyong Chen, C. K. Chen, Shih‐Chun Wei et al. · Applied Physics Letters · 1998 · 165 citations

, , +17

Crystalline SiCN: a hard material rivals to cubic BN

Li–Chyong Chen, Kuei‐Hsien Chen, Shih‐Chun Wei et al. · Thin Solid Films · 1999 · 93 citations

, , +10

Plasma-deposited passivation layers for moisture and water protection

Malte Ruben Vogt, R. Hauptmann · Surface and Coatings Technology · 1995 · 92 citations

, , +14

Wide band gap silicon carbon nitride films deposited by electron cyclotron resonance plasma chemical vapor deposition

Kuei‐Hsien Chen, Jih‐Jen Wu, C Y Wen et al. · Thin Solid Films · 1999 · 64 citations · Full text

, , +12