Plasma-deposited passivation layers for moisture and water protection

Particulate generation in silane/ammonia rf discharges

H. Anderson, Rahul Jairath, Joseph L. Mock · Journal of Applied Physics · 1990 · 62 citations

Natural Sciences, Materials Science, Physics +15

Kinetic Modeling of the Chemical Vapor Deposition of Silicon Dioxide from Silane or Disilane and Nitrous Oxide

Carmen J. Giunta, J. Chapple-Sokol, Roy G. Gordon · Journal of The Electrochemical Society · 1990 · 48 citations

Natural Sciences, Chemistry, Materials Science +14

Chemical Composition, Charge Trapping, and Memory Properties of Oxynitride Films for MNOS Devices

Vik J. Kapoor, Robert S. Bailey, R. Turi · Journal of The Electrochemical Society · 1990 · 30 citations

Engineering, Materials Engineering, Materials Science +17

Behavior of a ‐ SiN :  H  and a ‐ SiON :  H  Films in Condensed Water

John Osenbach, W. R. Knolle · Journal of The Electrochemical Society · 1992 · 28 citations

Engineering, Materials Engineering, Materials Science +17

Mobile Charge in a Novel Spin‐On Oxide (SOX): Detection of Hydrogen in Dielectrics

N. Lifshitz, G. Smolinsky, J. M. Andrews · Journal of The Electrochemical Society · 1989 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +13