Microelectronic Engineering · 2011 · 33 citations · 29 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface EngineeringSurface ScienceBioprintingMask FabricationNanoimprint LithographySoft LithographySurface ModificationThin-film PatterningLithographic Surface PatterningSoft EtchingSoft Lithographic Device FabricationSoft Nanoimprint LithographyUv Nanoimprint Lithography
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