Concepedia

Soft Etching

Soft Etching is a methodological technique within the domain of soft lithography that selectively removes material from a substrate using a patterned elastomeric stamp as a masking agent to define micro- or nano-scale features through localized chemical or physical etching.

22

Publications

3K

Citations

119

Authors

50

Institutions

Publications per year

2017–2026

6

Parents

Publications

22

Soft lithography for micro- and nanoscale patterning

Dong Qin, Younan Xia, George M. Whitesides · Nature Protocols · 2010 · 2.3K citations · Full text

, , +14

Atomic-layer soft plasma etching of MoS2

Shaoqing Xiao, Peng Xiao, Xuecheng Zhang et al. · Scientific Reports · 2016 · 124 citations · Full text

, , +17

Flexible Nanoscale High-Performance FinFETs

Galo A. Torres Sevilla, Mohamed T. Ghoneim, Hossain M. Fahad et al. · ACS Nano · 2014 · 73 citations

, , +16

Fabrication of Silicon MOSFETs Using Soft Lithography

Noo Li Jeon, Junmin Hu, GeorgeM. Whitesides et al. · Advanced Materials · 1998 · 54 citations

, , +12

Highly homogeneous YBCO/LSMO nanowires for photoresponse experiments

Riccardo Arpaia, L. Parlato, R. Cristiano et al. · Superconductor Science and Technology · 2014 · 39 citations

, , +17

1–5 of 22

Authors

119

  1. RG
    Ralph G. Nuzzo

    University of Illinois Urbana-Champaign, United States

    2 publications · 72 citations

    2

    h-index

  2. SN
    Satoshi Ninomiya

    University of Yamanashi, Japan

    2 publications · 27 citations

    2

    h-index

  3. GM
    George M. Whitesides

    Harvard University, United States

    2 publications · 2.3K citations

    2

    h-index

  4. KH
    Kenzo Hiraoka

    University of Yamanashi, Japan

    2 publications · 27 citations

    2

    h-index

  5. LC
    Lee Chuin Chen

    University of Yamanashi, Japan

    2 publications · 27 citations

    2

    h-index

1–5 of 119

Institutions

50

  1. Harvard University

    Cambridge, United States

    3 h-index

    7 publications

    2.5K citations

  2. University of Illinois Urbana-Champaign

    Urbana, United States

    2 h-index

    6 publications

    180 citations

  3. University of Yamanashi

    Kofu, Japan

    2 h-index

    7 publications

    92 citations

  4. Institut interdisciplinaire d'innovation technologique

    Sherbrooke, Canada

    1 h-index

    7 publications

    77 citations

  5. Southeast University

    Nanjing, China

    1 h-index

    1 publications

    124 citations

  6. University College London

    London, United Kingdom

    1 h-index

    9 publications

    207 citations

  7. Laboratoire de Physique des Interfaces et des Couches Minces

    Palaiseau, France

    1 h-index

    1 publications

    11 citations

  8. Superconducting and other Innovative Materials and Devices Institute

    Genoa, Italy

    1 h-index

    5 publications

    195 citations

1–8 of 50

Venues

  1. Advanced Materials

    2 publications · 77 citations

    2

    h-index

  2. physica status solidi (a)

    1 publications · 11 citations

    1

    h-index

  3. ECS Journal of Solid State Science and Technology

    JSS · 1 publications · 35 citations

    1

    h-index

  4. Journal of Surface Analysis

    1 publications · 11 citations

    1

    h-index

  5. Journal of Materials Chemistry

    1 publications · 11 citations

    1

    h-index

1–5