<title>LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer</title>

Abstract

A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (<b>LI</b>thographic <b>G</b>alvanoformung and <b>A</b>bformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.