Dean Wiberg

Taguchi optimization for the processing of Epon SU-8 resist

B. Eyre, Julian O. Blosiu, Dean Wiberg · 2002 · 30 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

A wafer-scale membrane transfer process for the fabrication of optical quality, large continuous membranes

Eui‐Hyeok Yang, Dean Wiberg · Journal of Microelectromechanical Systems · 2003 · 26 citations

Engineering, Materials Engineering, Materials Science +14

<title>High-performance MEMS microgyroscope</title>

Sam Y. Bae, Ken Hayworth, Karl Y. Yee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 25 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

<title>LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer</title>

Dean Wiberg, Nosang V. Myung, B. Eyre et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 19 citations

Engineering, Materials Engineering, Materials Science +13