Concepedia
Microelectronic Engineering · 2005 · 56 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryMetallic MaterialsMetallurgyDopingElectrical ConductivityMetalsAnnealing EffectsAnnealing Temperature EffectsCopper AlloysElectroplated MaterialsImpurities
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Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces
A. F. Mayadas, M. Shatzkes · Physical review. B, Solid state · 1970 · 2.2K citations
Natural Sciences, Materials Science, Physics +17
Superconformal Electrodeposition of Copper in 500–90 nm Features
Thomas P. Moffat, John E. Bonevich, William Huber et al. · Journal of The Electrochemical Society · 2000 · 403 citations
Natural Sciences, Materials Engineering, Materials Science +17
Mechanisms for microstructure evolution in electroplated copper thin films near room temperature
J. M. E. Harper, C. Cabral, P. C. Andricacos et al. · Journal of Applied Physics · 1999 · 359 citations
Electrodeposition of Copper in the SPS-PEG-Cl Additive System
Thomas P. Moffat, Daniel Wheeler, D. Josell · Journal of The Electrochemical Society · 2004 · 356 citations
Natural Sciences, Chemistry, Materials Science +17
Influence of additives on Cu electrodeposition mechanisms in acid solution: direct current study supported by non-electrochemical measurements
Lucien Bonou, Marielle Eyraud, Renaud Denoyel et al. · Electrochimica Acta · 2002 · 182 citations
Natural Sciences, Chemistry, Materials Science +16