Concepedia

M. Stangl

MS

8

Publications

337

Citations

8

H-Index

2005

Active since

Affiliations

Leibniz Institute for Solid State and Materials Research(Current)

University of British Columbia

Chemnitz University of Technology

M. Stangl is an author at Leibniz Institute for Solid State and Materials Research specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

2005–2008

8

Publications

8

Incorporation of sulfur, chlorine, and carbon into electroplated Cu thin films

M. Stangl, J. Acker, Stefan Oswald et al. · Microelectronic Engineering · 2006 · 94 citations

, , +8

Influence of initial microstructure and impurities on Cu room-temperature recrystallization (self-annealing)

M. Stangl, M. Lipták, Alison Fletcher et al. · Microelectronic Engineering · 2007 · 87 citations

, , +9

Characterization of electroplated copper self-annealing with investigations focused on incorporated impurities

M. Stangl, J. Acker, V. Dittel et al. · Microelectronic Engineering · 2005 · 56 citations

, , +8

Investigation of organic impurities adsorbed on and incorporated into electroplated copper layers

M. Stangl, V. Dittel, J. Acker et al. · Applied Surface Science · 2005 · 33 citations

, , +9

Analysis of interface impurities in electroplated Cu layers by using GD‐OES and TOF‐SIMS

Denis Klemm, M. Stangl, A. Peeva et al. · Surface and Interface Analysis · 2008 · 25 citations

, , +16

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