Real-time characterization of dielectric charging in contactless capacitive MEMS

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Jürgen Wibbeler, Günter Pfeifer, Michael Hietschold · Sensors and Actuators A Physical · 1998 · 297 citations

Electrical Engineering, Dielectrics, Engineering +9

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

W. Merlijn van Spengen, Robert Puers, R. Mertens et al. · Journal of Micromechanics and Microengineering · 2004 · 245 citations

Engineering, Radio Frequency, Power Electronics +16

Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes

Xavier Rottenberg, Ingrid De Wolf, Bart Nauwelaers et al. · Journal of Microelectromechanical Systems · 2007 · 144 citations

Electrical Engineering, Mems Devices, Engineering +14

The effect of integrator leak in Sigma - Delta modulation

Orla Feely, Leon O. Chua · IEEE Transactions on Circuits and Systems · 1991 · 136 citations

Analog Design, Nonlinear Dynamics, Integrator Leak +3

Characterization of dielectric charging in RF MEMS capacitive switches

R.W. Herfst, H.G.A. Huizing, Peter G. Steeneken et al. · 2006 · 72 citations

Electrical Engineering, Dielectrics, Engineering +11