Advanced excimer-laser annealing process for quasi single-crystal silicon thin-film devices

XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's

Toshiyuki Sameshima, M. Sekiya · IEEE Electron Device Letters · 1986 · 444 citations

Engineering, Electrical Engineering, Materials Science +16

Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor

Hiroyuki Kuriyama, Seiichi Kiyama, Shigeru Noguchi et al. · Japanese Journal of Applied Physics · 1991 · 153 citations

Engineering, Materials Engineering, Materials Science +17

A Novel Phase-Modulated Excimer-Laser Crystallization Method of Silicon Thin Films

Chang-Ho Oh Chang-Ho Oh, M. Ozawa, Masakiyo Matsumura · Japanese Journal of Applied Physics · 1998 · 143 citations

Natural Sciences, Materials Engineering, Materials Science +17

Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid-phase crystallization: Theory, experiments, and thin-film transistor applications

Noriyoshi Yamauchi, R. Reif · Journal of Applied Physics · 1994 · 142 citations

Engineering, Materials Engineering, Materials Science +17

Crystalline Si Films for Integrated Active-Matrix Liquid-Crystal Displays

James S. Im, Robert S. Sposili · MRS Bulletin · 1996 · 122 citations

Natural Sciences, Materials Engineering, Materials Science +14