13
Publications
1.8K
Citations
12
H-Index
1985
Active since
Affiliations
M. Sekiya is an author at Fujitsu (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsElectrical EngineeringMicroelectronicsSurface ScienceSemiconductorsOptoelectronicsIntegrated Circuits
Publications per year
1985–2006
13
13
A Kohno, Toshiyuki Sameshima, Naoki Sano et al. · IEEE Transactions on Electron Devices · 1995 · 154 citations
Engineering, Plasma Hydrogenation, Thin Film Process Technology +16
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1–5 of 13