Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

Anemometer with hot platinum thin film

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Engineering, Physics, Measurement +6

Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia

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Materials Engineering, Materials Science, Optical Materials +13

Micromachined thermal accelerometer

F. Mailly, Alain Giani, A. Martínez et al. · Sensors and Actuators A Physical · 2003 · 124 citations

Engineering, Mechanical Engineering, Accelerometer +6

Micromachined accelerometer based on convection heat transfer

Albert M. Leung, J.C. Jones, E. Czyzewska et al. · 2002 · 119 citations

Convection Heat Transfer, Simon Fraser University, Engineering +14

Micromachined inclinometer with high sensitivity and very good stability

S. Billat, H. Glosch, M Kunze et al. · Sensors and Actuators A Physical · 2002 · 102 citations

Engineering, Micromachines, High Sensitivity +7