S. Billat

Dielectric filters made of PS: advanced performance by oxidation and new layer structures

M. Berger, R. Arens-Fischer, M. Thönissen et al. · Thin Solid Films · 1997 · 149 citations

Materials Science, Electrical Engineering, Chemical Engineering +9

Micromachined inclinometer with high sensitivity and very good stability

S. Billat, H. Glosch, M Kunze et al. · Sensors and Actuators A Physical · 2002 · 102 citations

Engineering, Micromachines, High Sensitivity +7

Influence of etch stops on the microstructure of porous silicon layers

S. Billat, M. Thönissen, R. Arens-Fischer et al. · Thin Solid Films · 1997 · 94 citations

Materials Engineering, Materials Science, Engineering +9

Analysis of the depth homogeneity of p-PS by reflectance measurements

M. Thönissen, M. Berger, S. Billat et al. · Thin Solid Films · 1997 · 56 citations

Optical Materials, Optical System Analysis, Engineering +11

Structuring of membrane sensors using sacrificial porous silicon

F. Hedrich, S. Billat, Walter Lang · Sensors and Actuators A Physical · 2000 · 56 citations

Membrane Sensors, Engineering, Microfabrication +6