Statistics
Publications
18
Citations
820
H-Index
17
Active since
1992
S. Billat is an author at Hahn-Schickard-Gesellschaft für angewandte Forschung specializing in engineering, materials science, and materials engineering.
Publications per year
1992–2014
18
18
Micromachined inclinometer with high sensitivity and very good stability
S. Billat, H. Glosch, M Kunze et al. · Sensors and Actuators A Physical · 2002 · 102 citations
Influence of etch stops on the microstructure of porous silicon layers
S. Billat, M. Thönissen, R. Arens-Fischer et al. · Thin Solid Films · 1997 · 94 citations
Analysis of the depth homogeneity of p-PS by reflectance measurements
M. Thönissen, M. Berger, S. Billat et al. · Thin Solid Films · 1997 · 56 citations
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