F. Hedrich

Thermal flow sensor for liquids and gases based on combinations of two principles

M. Ashauer, H. Glosch, F. Hedrich et al. · Sensors and Actuators A Physical · 1999 · 195 citations

Engineering, Fluid Mechanics, Thermal Management +10

Micromachined inclinometer with high sensitivity and very good stability

S. Billat, H. Glosch, M Kunze et al. · Sensors and Actuators A Physical · 2002 · 102 citations

Engineering, Micromachines, High Sensitivity +7

Structuring of membrane sensors using sacrificial porous silicon

F. Hedrich, S. Billat, Walter Lang · Sensors and Actuators A Physical · 2000 · 56 citations

Membrane Sensors, Engineering, Microfabrication +6

Thermal flow sensor for liquids and gases

M. Ashauer, H. Glosch, F. Hedrich et al. · 2002 · 48 citations

Environmental Monitoring, Engineering, Measurement +17

Thermal flow sensors for MEMS spirometric devices

F. Hedrich, K. Kliche, M. Storz et al. · Sensors and Actuators A Physical · 2010 · 48 citations

Engineering, Sensors, Microfabrication +7