Coplanar waveguide transmission lines and highQ inductors on CMOS grade silicon using photoresist and polyimide

Abstract

Gold coplanar waveguide (CPW) transmission lines with losses of < 0.5 dB/mm at 60 GHz have been produced on CMOS grade silicon substrates using a 15 µm thick layer of either photoresist or polyimide. This process, together with an electroplated interconnect technique, has been used to produce spiral inductors on a 2 Ω/cm n-Si substrate with a Q of 15 and L of 1.2 nH at 6 GHz.