Concepedia

Damage profiling of Ar+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

J.C. Lee, Changseop Jeong, H. J. Kang, H.K. Kim, Dae Won Moon

Applied Surface Science · 1996 · 17 citations · 17 references

DOI

Concepts

References

17

Ion beam crystallography of surfaces and interfaces

J. F. van der Veen · Surface Science Reports · 1985 · 602 citations

, , +12

Energy dependence of the sputtering yield of silicon bombarded with neon, argon, krypton, and xenon ions

P. C. Zalm · Journal of Applied Physics · 1983 · 180 citations

, , +11

Silicon surface cleaning by low dose argon-ion bombardment for low-temperature (750 °C) epitaxial silicon deposition. I. Process considerations

J.H. Comfort, L. M. Garverick, R. Reif · Journal of Applied Physics · 1987 · 90 citations

, , +17

Ion scattering analysis programs for studying surface and interface structures

Yoshiaki Kido, T. Koshikawa · Journal of Applied Physics · 1990 · 76 citations

, , +17

Radiation damage in silicon (001) due to low energy (60–510 eV) argon ion bombardment

A. Al-Bayati, Kevin Orrman-Rossiter, R. Badheka et al. · Surface Science · 1990 · 57 citations

, , +13