Concepedia

L. M. Garverick

LM

4

Publications

183

Citations

4

H-Index

1987

Active since

Affiliations

Massachusetts Institute of Technology(Current)

L. M. Garverick is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and thin films.

Top concepts

EngineeringThin FilmsApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsIntegrated CircuitsElectrical EngineeringSolar PowerPhotovoltaics

Publications per year

1987–1996

4

Publications

4

Silicon surface cleaning by low dose argon-ion bombardment for low-temperature (750 °C) epitaxial silicon deposition. I. Process considerations

J.H. Comfort, L. M. Garverick, R. Reif · Journal of Applied Physics · 1987 · 90 citations

Engineering, Native Oxide, Silicon Surface Cleaning +17

Silicon surface cleaning by low dose argon-ion bombardment for low-temperature (750 °C) epitaxial deposition. II. Epitaxial quality

L. M. Garverick, J.H. Comfort, Tri‐Rung Yew et al. · Journal of Applied Physics · 1987 · 52 citations

Materials Engineering, Materials Science, Ion Implantation +15

Operation and component testing of a solar thermophotovoltaic power system

Kenneth W. Stone, Navid S. Fatemi, L. M. Garverick · 1996 · 22 citations

Engineering, Energy Efficiency, Energy Conversion +18

Bipolar transistor fabrication in low-temperature (745°C) ultra-low-pressure chemical-vapor-deposited epitaxial silicon

Wolfgang Bürger, J.H. Comfort, L. M. Garverick et al. · IEEE Electron Device Letters · 1987 · 19 citations

Semiconductors, Successful Fabrication, Electrical Engineering +13

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