Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures - Concepedia

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Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures

45

Citations

14

References

1996

Year

Shoichi Furukawa, Mehran Mehregany

Sensors and Actuators A Physical

Materials ScienceHigh-aspect-ratio MicrostructuresWafer Scale ProcessingEngineeringMicrofabricationFabrication TechniqueApplied PhysicsElectroless PlatingMicro-optical ComponentMicroelectronicsNanolithography MethodMicrostructure

References

	Year	Citations

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