Investigation on AlN epitaxial growth and related etching phenomenon at high temperature using high temperature chemical vapor deposition process

A. Claudel, E. Blanquet, Didier Chaussende, R. Boichot, B. Doisneau, G. Berthomé, Alexandre Crisci, Hugues Mank, C. Moisson, D. Pique,

Journal of Crystal Growth · 2011 · 17 citations · 35 references

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