Focused ion beam gallium implantation into silicon

Solid Solubilities of Impurity Elements in Germanium and Silicon*

F. A. Trumbore · Bell System Technical Journal · 1960 · 1.4K citations

Natural Sciences, Chemistry, Materials Science +15

Micro-Probe Reflection High-Energy Electron Diffraction Technique. I. Determination of Crystallographic Orientations of Polycrystal-Silicon Surfaces

Masakazu Ichikawa, Kazunobu Hayakawa · Japanese Journal of Applied Physics · 1982 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electrical Properties of Focused-Ion-Beam Boron-Implanted Silicon

M. Tamura, S. Shukuri, S. Tachi et al. · Japanese Journal of Applied Physics · 1983 · 34 citations

Engineering, Materials Engineering, Materials Science +16

Hall effect measurements on Sb and Ga implanted silicon; Anneal behavior and comparison with other species

Nils Gunnar Johansson, J. W. Mayer · Solid-State Electronics · 1970 · 32 citations

Engineering, Materials Engineering, Materials Science +16

Furnace annealing behavior of phosphorus implanted, laser annealed silicon

Masanobu Miyao, Kazuo Itoh, M. Tamura et al. · Journal of Applied Physics · 1980 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +15