Statistics
Publications
1
Citations
37
H-Index
1
Active since
1986
Affiliations
Hitachi (Japan)(Current)
M. Default is an author at Hitachi (Japan) specializing in electronic materials, ion implantation, and ion implantation effects.
Publications per year
1986–1986
1
1
Focused ion beam gallium implantation into silicon
M. Tamura, S. Shukuri, Masahiro Moniwa et al. · Applied Physics A · 1986 · 37 citations
Engineering, Electrical Engineering, Electronic Materials +5
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