Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 12 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface SciencePhotoelectron SpectroscopySemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSurface PhysicsDevice FabricationFabrication ProcessesPassivation MechanismsPlatingSemiconductor CharacterizationSemiconductor Surface PreparationSurface StatesWafer Materials
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