Growth mechanism of reactively sputtered aluminum nitride thin films

Control of preferred orientation for ZnO films: control of self-texture

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Natural Sciences, Materials Engineering, Materials Science +10

Reaction-bonded silicon nitride: its formation and properties

A. J. Moulson · Journal of Materials Science · 1979 · 392 citations

Engineering, Materials Engineering, Materials Science +11

Reactive molecular beam epitaxy of aluminium nitride

S. Yoshida, S. Misawa, Youhei Fujii et al. · Journal of Vacuum Science and Technology · 1979 · 197 citations

Natural Sciences, Materials Science, Physics +17

Epitaxial growth of AlN thin films on silicon (111) substrates by pulsed laser deposition

R. D. Vispute, J. Narayan, Hong Wu et al. · Journal of Applied Physics · 1995 · 147 citations

Natural Sciences, Materials Engineering, Materials Science +16

Preparation of c-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering

Hiroshi Okano, Yusuke Takahashi, Toshiharu Tanaka et al. · Japanese Journal of Applied Physics · 1992 · 123 citations

Natural Sciences, Materials Engineering, Materials Science +15