Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

New materials for micro-scale sensors and actuators

Stephen Wilson, Renaud Jourdain, Qi Zhang et al. · Materials Science and Engineering R Reports · 2007 · 509 citations · Full text

Engineering, Materials Engineering, Materials Science +14

Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity

Nannan Chen, Charles L. Tucker, Jonathan Engel et al. · Journal of Microelectromechanical Systems · 2007 · 226 citations

Engineering, Bioengineering, Biological Engineering +17

A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

H.P. Lang, Rüdiger Berger, F. Battiston et al. · Applied Physics A · 1998 · 223 citations · Full text

Engineering, Chemical Engineering, Mechanical Engineering +14

Cantilever Sensors: Nanomechanical Tools for Diagnostics

Ram H. Datar, Seonghwan Kim, Sangmin Jeon et al. · MRS Bulletin · 2009 · 162 citations · Full text

Engineering, Materials Science, Mechanical Engineering +14

Self-assembling MEMS variable and fixed RF inductors

Victor M. Lubecke, Bradley P. Barber, E. Chan et al. · IEEE Transactions on Microwave Theory and Techniques · 2001 · 128 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16