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A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

H.P. Lang, Rüdiger Berger, F. Battiston, J.-P. Ramseyer, Ernst Meyer, C. Andreoli, Juergen Brügger, P. Vettiger, M. Despont, T. Mezzacasa,

Applied Physics A · 1998 · 223 citations · 2 references

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