MRS Proceedings · 1997 · 23 citations · 10 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsAmorphous Electronic MaterialsAmorphous SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin-film MaterialsThin-film TransistorsAmorphous Semiconductor FilmsAmorphous SiliconAmorphous Silicon Thin-film TransistorsSilicon Thin FilmsThin-film Semiconductors
10
G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations
Defect pool in amorphous-silicon thin-film transistors
M. J. Powell, C. van Berkel, A. R. Franklin et al. · Physical review. B, Condensed matter · 1992 · 237 citations
Plasma deposition of amorphous silicon-based materials
W Steckelmacher · Vacuum · 1996 · 75 citations
Natural Sciences, Materials Engineering, Materials Science +14