Darren T. Murley

An investigation of laser annealed and metal-induced crystallized polycrystalline silicon thin-film transistors

Darren T. Murley, N. D. Young, M. J. Trainor et al. · IEEE Transactions on Electron Devices · 2001 · 82 citations

Materials Science, Laser Exposure, Electrical Engineering +13

The effect of hydrogen dilution on the aminosilane plasma regime used to deposit nitrogen-rich amorphous silicon nitride

Darren T. Murley, I. D. French, Steven C. Deane et al. · Journal of Non-Crystalline Solids · 1996 · 29 citations

Materials Science, Chemical Engineering, Aminosilane Plasma Regime +7

The Effect of the Amorphous Silicon Alpha-Gamma Transition on Thin Film Transistor Performance

I. D. French, S. C. Deane, Darren T. Murley et al. · MRS Proceedings · 1997 · 23 citations

Electrical Engineering, Engineering, Applied Physics +3

Influence of gas residence time on the deposition of nitrogen-rich amorphous silicon nitride

Darren T. Murley, R.A.G. Gibson, B. Dunnett et al. · Journal of Non-Crystalline Solids · 1995 · 22 citations

Materials Science, Engineering, Gas Residence Time +6