Concepedia
Journal of Crystal Growth · 1993 · 18 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ScienceChemical Vapor DepositionSurface ModificationSurface TreatmentThin-film DepositionArea-selective DepositionChemical Vapor Deposition MaterialsMetalorganic Chemical Vapor Deposition
12
Chemical etching of GaAs and InP by chlorine: The thermodynamically predicted dependence on Cl2 pressure and temperature
S. C. McNevin · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 131 citations
Natural Sciences, Chemistry, Materials Science +17
The Anodic Oxidation of GaAs in Aqueous H[sub 2]O[sub 2] Solution
R. A. Logan, B. Schwartz, W. J. Sundburg · Journal of The Electrochemical Society · 1973 · 89 citations
Natural Sciences, Materials Engineering, Materials Science +17
Selective Epitaxial Deposition of Gallium Arsenide in Holes
Don W. Shaw · Journal of The Electrochemical Society · 1966 · 87 citations
Engineering, Materials Engineering, Materials Science +16
Selective epitaxy in the conventional metalorganic vapor phase epitaxy of GaAs
T. F. Kuech, M. A. Tischler, R. M. Potemski · Applied Physics Letters · 1989 · 68 citations
Engineering, Materials Engineering, Materials Science +15
UV absorption spectroscopy for monitoring hydride vapor-phase epitaxy of InGaAsP alloys
R. F. Karlicek, B. Hammarlund, J. C. Ginocchio · Journal of Applied Physics · 1986 · 44 citations