Concepedia

S. C. McNevin

SC

10

Publications

376

Citations

10

H-Index

1984

Active since

Affiliations

AT&T (United States)(Current)

S. C. McNevin is an author at AT&T (United States) specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringPhysicsChemical EngineeringThin Films

Publications per year

1984–1998

10

Publications

10

Chemical etching of GaAs and InP by chlorine: The thermodynamically predicted dependence on Cl2 pressure and temperature

S. C. McNevin · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 131 citations

Engineering, Plasma Processing, Semiconductors +16

Investigation of the kinetic mechanism for the ion-assisted etching of GaAs in Cl2 using a modulated ion beam

S. C. McNevin, G. E. Becker · Journal of Applied Physics · 1985 · 45 citations

Ion-assisted Etching, Engineering, Dry Plasma Etching +16

A thermochemical model for the plasma etching of aluminum in BCl3/Cl2 and BBr3/Br2

S. C. McNevin · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 43 citations

Aluminium Nitride, Engineering, Quantitative Recipe Map +16

Rare gas ion-enhanced etching of InP by Cl2

S. C. McNevin · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 42 citations

Materials Science, Engineering, Surface Science +9

Investigation of kinetic mechanism for the ion-assisted etching of Si in Cl2

S. C. McNevin, G. E. Becker · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 41 citations

Ion-assisted Etching, Engineering, Chemistry +17

Rows per page

1–5 of 10