Concepedia
Thin Solid Films · 1984 · 42 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoatingsThin-film DepositionDeposition ProcessesReactive SputteringSputter DepositionSputteringSputtering Processes
17
Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
N. Laegreid, G. K. Wehner · Journal of Applied Physics · 1961 · 807 citations
Natural Sciences, Materials Science, Physics +13
Reactive sputtering of metals in oxidizing atmospheres
Johannes Heller · Thin Solid Films · 1973 · 148 citations
Natural Sciences, Materials Engineering, Materials Science +8
Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode
S. Schiller, G. Beister, William K. Sieber · Thin Solid Films · 1984 · 145 citations
Natural Sciences, Materials Engineering, Materials Science +17
Influence of the nitrogen partial pressure on the properties of d.c.-sputtered titanium and titanium nitride films
Guy Lempérière, J.M. Poitevin · Thin Solid Films · 1984 · 128 citations
Natural Sciences, Materials Engineering, Materials Science +14
The deposition rate of metallic thin films in the reactive sputtering process
Tetsuya Abe, Toshiro Yamashina · Thin Solid Films · 1975 · 127 citations