Determination of Young's modulus and yield stress of porous low-k materials by nanoindentation

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Low dielectric constant materials for microelectronics

Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

A simple predictive model for spherical indentation

J.S. Field, Michael V. Swain · Journal of materials research/Pratt's guide to venture capital sources · 1993 · 683 citations

Engineering, Materials Engineering, Mechanical Engineering +8

Understanding nanoindentation unloading curves

George M. Pharr, Alexei Bolshakov · Journal of materials research/Pratt's guide to venture capital sources · 2002 · 477 citations

Natural Sciences, Materials Engineering, Materials Science +7

Determination of elastic modulus of thin layers using nanoindentation

Jaroslav Menčík, D. Münz, Eckhard Quandt et al. · Journal of materials research/Pratt's guide to venture capital sources · 1997 · 360 citations

Natural Sciences, Materials Engineering, Materials Science +14