RF-MEMS switch design optimization for long-term reliability

Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes

Xavier Rottenberg, Ingrid De Wolf, Bart Nauwelaers et al. · Journal of Microelectromechanical Systems · 2007 · 146 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Temperature study of the dielectric polarization effects of capacitive RF MEMS switches

G. Papaioannou, M.-N. Exarchos, V. Theonas et al. · IEEE Transactions on Microwave Theory and Techniques · 2005 · 119 citations

Engineering, Electrical Engineering, Materials Science +17

Acceleration of Dielectric Charging in RF MEMS Capacitive Switches

Xiaobin Yuan, Zhen Peng, James C. M. Hwang et al. · IEEE Transactions on Device and Materials Reliability · 2006 · 82 citations

Engineering, Electrical Engineering, Electromagnetics +16

Charging in Dielectricless Capacitive RF-MEMS Switches

David Mardivirin, Arnaud Pothier, Aurélian Crunteanu et al. · IEEE Transactions on Microwave Theory and Techniques · 2008 · 79 citations

Engineering, Electrical Engineering, Circuit Theory +16

Review of Device and Reliability Physics of Dielectrics in Electrostatically Driven MEMS Devices

Wim A. de Groot, James R. Webster, D. Felnhofer et al. · IEEE Transactions on Device and Materials Reliability · 2009 · 74 citations

Engineering, Electrical Engineering, Materials Science +17