2003 · 12 citations · 5 references
EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesDesign For TestabilityDevice CharacterizationDielectricsElectrical CharacterizationElectrical System TestingIntegrated Circuit DesignAluminaCharged Device ModelCorrelationDielectric CharacterizationElectrical TestabilityElectrical Testing Of Mems DevicesElectrostatic Discharge TestingRepeatability
In this work, we demonstrate that both capacitance and inductance must be the central parameters associated with the charged device model (CDM) waveform verification modules. We also propose a change from the previously used FR-4 dielectric material substrate to a more stable alumina. This improves waveform repeatability and will lead to better correlation of test results. This paper completes the groundwork for a full ESDA CDM device testing standard.
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Charged device model (CDM) metrology: limitations and problems