Concepedia

Improvement of leakage current characteristics of Ba0.5Sr0.5TiO3 films by N2O plasma surface treatment

Hag‐Ju Cho, Sejun Oh, Chang Seok Kang, Cheol Seong Hwang, Byong‐Taek Lee, Ki Hoon Lee, Hideki Horii, Sang In Lee, Moon Yong Lee

Applied Physics Letters · 1997 · 36 citations · 3 references

DOI

Concepts

Abstract

The effects of plasma surface treatment, using N2O gas, of Ba0.5Sr0.5TiO3 (BST) film on the leakage current characteristic of a Pt/BST/Pt capacitor were investigated. As a result of exposure of BST film to the plasma, the leakage current density of the BST capacitor decreased by two orders of magnitude in the high voltage region, and higher onset voltage of an abrupt increase in leakage current was observed. The improvement of leakage properties of BST films can be attributed to the elimination of the bulged curve in the leakage current characteristics. Thermal desorption spectroscopy showed that the elimination was closely related to the reduction of carbon content in the BST film.

References

3

Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra-large-scale integrated dynamic random access memory application

Cheol Seong Hwang, Soon Oh Park, Hag‐Ju Cho et al. · Applied Physics Letters · 1995 · 287 citations

, , +20

Leakage current reduction in chemical-vapor-deposited Ta<sub>2</sub>O<sub>5</sub> films by rapid thermal annealing in N<sub>2</sub>O

Shuo Sun, T.F. Chen · IEEE Electron Device Letters · 1996 · 54 citations

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Thermal Desorption Spectroscopy of (Ba, Sr)TiO<sub>3</sub> Thin Films Prepared by Chemical Vapor Deposition

Mikio Yamamuka, Takaaki Kawahara, Tetsuro Makita et al. · Japanese Journal of Applied Physics · 1996 · 19 citations

, , +15