Tetsuro Makita - Concepedia

Author

Tetsuro Makita

Mitsubishi Electric (Japan)

Also Known As

T. Makita, Tetsuro MAKITA, Tetsuro Makita

Publications

671

Citations

H-Index

Concepts

All Affiliations

Mitsubishi Electric (Japan)Mitsubishi Electric (Germany)

About

Tetsuro Makita is an author at Mitsubishi Electric (Japan) specializing in applied physics, thin films, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	7	7	623
2	Applied Physics	7	7	623
3	Materials Science	7	7	623
4	Electrical Engineering	3	3	354
5	Materials Engineering	1	1	100

Tetsuro Makita

Publications

623

Citations

H-Index

Page 1

	Year	Citations
Dielectric Properties of (Ba, Sr)TiO<sub>3</sub> Thin Films Deposited by RF Sputtering Tsuyoshi Horikawa, Noboru Mikami, Tetsuro Makita, Japanese Journal of Applied Physics Materials ScienceDielectric PropertiesElectrical EngineeringDielectric ConstantEngineering	1993	234
Dielectric Properties of (Ba<sub>x</sub>Sr<sub>1-x</sub>)TiO<sub>3</sub> Thin Films Prepared by RF Sputtering for Dynamic Random Access Memory Application Takeharu Kuroiwa, Yoshikazu Tsunemine, Tsuyoshi Horikawa, Japanese Journal of Applied Physics Materials ScienceDielectric PropertiesDielectric ConstantEngineeringFerroelectric Application	1994	112
Step Coverage and Electrical Properties of (Ba, Sr)TiO<sub>3</sub> Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)<sub>2</sub> Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita, Japanese Journal of Applied Physics Materials ScienceMaterials EngineeringThin Film PhysicsEngineeringTio 3	1994	100
Dielectric Relaxation of (Ba, Sr)TiO<sub>3</sub> Thin Films Tsuyoshi Horikawa, Tetsuro Makita, Takeharu Kuroiwa, Japanese Journal of Applied Physics Non-volatile MemoryEngineeringEmerging Memory TechnologyThin Film Process TechnologyPhase Change Memory	1995	87
Preparation of (Ba, Sr)TiO<sub>3</sub> Thin Films by Chemical Vapor Deposition Using Liquid Sources Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita, Japanese Journal of Applied Physics Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied Physics	1994	38
Novel stacked capacitor technology for 1 Gbit DRAMs with CVD-(Ba,Sr)TiO/sub 3/ thin films on a thick storage node of Ru Akimasa Yuuki, Mikio Yamamuka, Tetsuro Makita, Materials ScienceNon-volatile MemoryElectrical EngineeringGbit DramsEngineering	2002	33
Thermal Desorption Spectroscopy of (Ba, Sr)TiO<sub>3</sub> Thin Films Prepared by Chemical Vapor Deposition Mikio Yamamuka, Takaaki Kawahara, Tetsuro Makita, Japanese Journal of Applied Physics Materials ScienceMaterial AnalysisHigh Temperature MaterialsEngineeringTio 3	1996	19

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