Concepedia

Tetsuro Makita

TM

7

Publications

623

Citations

7

H-Index

1993

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Tetsuro Makita is an author at Mitsubishi Electric (Japan) specializing in applied physics, thin films, and materials science.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceSuperconductivitySurface ScienceElectrical EngineeringMicroelectronicsCondensed Matter PhysicsEnergy Storage

Publications per year

1993–2002

7

Publications

7

Dielectric Properties of (Ba, Sr)TiO<sub>3</sub> Thin Films Deposited by RF Sputtering

Tsuyoshi Horikawa, Noboru Mikami, Tetsuro Makita et al. · Japanese Journal of Applied Physics · 1993 · 234 citations

Materials Science, Dielectric Properties, Electrical Engineering +13

Dielectric Properties of (Ba<sub>x</sub>Sr<sub>1-x</sub>)TiO<sub>3</sub> Thin Films Prepared by RF Sputtering for Dynamic Random Access Memory Application

Takeharu Kuroiwa, Yoshikazu Tsunemine, Tsuyoshi Horikawa et al. · Japanese Journal of Applied Physics · 1994 · 112 citations

Materials Science, Dielectric Properties, Dielectric Constant +11

Step Coverage and Electrical Properties of (Ba, Sr)TiO<sub>3</sub> Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)<sub>2</sub>

Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita et al. · Japanese Journal of Applied Physics · 1994 · 100 citations

Materials Science, Materials Engineering, Thin Film Physics +13

Dielectric Relaxation of (Ba, Sr)TiO<sub>3</sub> Thin Films

Tsuyoshi Horikawa, Tetsuro Makita, Takeharu Kuroiwa et al. · Japanese Journal of Applied Physics · 1995 · 87 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +16

Preparation of (Ba, Sr)TiO<sub>3</sub> Thin Films by Chemical Vapor Deposition Using Liquid Sources

Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita et al. · Japanese Journal of Applied Physics · 1994 · 38 citations

Materials Science, Engineering, Oxide Electronics +9

Rows per page

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