Symposium on VLSI Technology · 1984 · 11 citations · 0 references
EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesDevice CharacterizationDevice ModelingDevice ScalingField-effect TransistorsMetal-oxide-semiconductor Field-effect TransistorsShort-channel EffectsChannel Length ScalingCmos ScalingMetal-oxide-semiconductor Field-effect Transistor ModelingMosfet ModelingShort-channel Mobility DegradationShort-channel Scaling TheorySource-drain Leakage