Concepedia

An Integrated Surface Micromachined Capacitive Lateral Accelerometer with 2µG/√Hz Resolution

Xinyi Jiang, Fei Wang, Michaël Kraft, Bernhard E. Boser

2002 · 39 citations · 14 references

DOIFull text

Open access

Concepts

Abstract

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10 -3 /Hz displacement resolution.

References

14

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A high-precision, wide-bandwidth micromachined tunneling accelerometer

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Low-noise MEMS vibration sensor for geophysical applications

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Surface micromachined piezoelectric accelerometers (PiXLs)

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