Simulation of Anisotropic Crystalline Etching using a Continuous Cellular Automata Algorithm

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

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Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

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Computer simulation of anisotropic crystal etching

Carlo H. Séquin · Sensors and Actuators A Physical · 1992 · 71 citations

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