Concepedia

Variable-capacitance Actuators

Variable-Capacitance Actuator is an electrostatic actuator that operates by modulating the capacitance between conductive electrodes through controlled variation of the overlapping area or gap distance, thereby converting electrical energy into mechanical motion via position-dependent capacitive forces.

17

Publications

595

Citations

56

Authors

27

Institutions

Publications per year

2017–2026

2

Variants

Variable-capacitance Actuator

Parents

Publications

17

A study of three microfabricated variable-capacitance motors

Mehran Mehregany, Stephen F. Bart, Lee S. Tavrow et al. · Sensors and Actuators A Physical · 1990 · 117 citations

, , +12

Surface micromachined mechanisms and micromotors

Mehran Mehregany, Yu‐Chong Tai · Journal of Micromechanics and Microengineering · 1991 · 93 citations

, , +17

Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning Capabilities

Hung D. Nguyen, Dooyoung Hah, Pamela Patterson et al. · Journal of Microelectromechanical Systems · 2004 · 81 citations

, , +15

Electrostatic artificial muscle: compact, high-power linear actuators with multiple-layer structures

T. Niino, Saku Egawa, Hitoshi Kimura et al. · 2002 · 42 citations

, , +17

Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion

A. Modafe, Nima Ghalichechian, Alexander Frey et al. · Journal of Micromechanics and Microengineering · 2006 · 34 citations

, , +17

1–5 of 17

Authors

56

  1. SS
    S.D. Senturia

    Massachusetts Institute of Technology, United States

    2 publications · 145 citations

    2

    h-index

  2. TH
    Toshiro Higuchi

    The University of Tokyo, Japan

    2 publications · 62 citations

    2

    h-index

  3. MM
    Mehran Mehregany

    Case Western Reserve University, United States

    2 publications · 210 citations

    2

    h-index

  4. JH
    Jeffrey H. Lang

    Massachusetts Institute of Technology, United States

    2 publications · 151 citations

    2

    h-index

  5. BE
    Bernhard E. Boser

    University of California, Berkeley, United States

    1 publications · 14 citations

    1

    h-index

1–5 of 56

Institutions

27

  1. Massachusetts Institute of Technology

    Cambridge, United States

    3 h-index

    9 publications

    792 citations

  2. King Abdullah University of Science and Technology

    Jeddah, Saudi Arabia

    1 h-index

    3 publications

    51 citations

  3. ASM Pacific Technology (China)

    Hong Kong, China

    1 h-index

    1 publications

    17 citations

  4. Lodz University of Technology

    Lodz, Poland

    1 h-index

    1 publications

    15 citations

  5. Urmia University

    Urmia, Iran

    1 h-index

    2 publications

    28 citations

  6. Hitachi (Japan)

    Tokyo, Japan

    1 h-index

    1 publications

    42 citations

  7. University of Trento

    Trento, Italy

    1 h-index

    2 publications

    62 citations

  8. Kanagawa Academy of Science and Technology

    Kawasaki, Japan

    1 h-index

    2 publications

    84 citations

1–8 of 27

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 4 publications · 156 citations

    4

    h-index

  2. Sensors and Actuators A Physical

    2 publications · 137 citations

    2

    h-index

  3. Journal of Microelectromechanical Systems

    1 publications · 81 citations

    1

    h-index

  4. 1

    h-index

  5. IEEE Transactions on Industrial Electronics

    1 publications · 27 citations

    1

    h-index

1–5