Concepedia

A. Modafe

AM

Statistics

Publications

10

Citations

536

H-Index

10

Active since

2002

Affiliations

University of Maryland, College Park(Current)

Sensors (United States)

Massachusetts Institute of Technology

A. Modafe is an author at University of Maryland, College Park specializing in microelectromechanical systems, engineering, and mems design.

Publications per year

2002–2008

10

Publications

10

Investigation of gray-scale technology for large area 3D silicon MEMS structures

Christopher M. Waits, A. Modafe, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2002 · 151 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Nima Ghalichechian, A. Modafe, Mustafa İlker Beyaz et al. · Journal of Microelectromechanical Systems · 2008 · 89 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +10

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

A. Modafe, Nima Ghalichechian, Michael A. Powers et al. · Microelectronic Engineering · 2005 · 58 citations

Engineering, Electrical Engineering, Materials Science +14

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

T.-W. Lin, A. Modafe, B. Shapiro et al. · IEEE Transactions on Instrumentation and Measurement · 2004 · 50 citations · Full text

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Dynamic characterization of a linear electrostatic micromotor supported on microball bearings

Nima Ghalichechian, A. Modafe, Jeffrey H. Lang et al. · Sensors and Actuators A Physical · 2006 · 41 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16

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