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Dynamic characterization of a linear electrostatic micromotor supported on microball bearings

KinesiologyEngineeringMicromachinesLinear Electrostatic MicromotorMechanical EngineeringMechatronicsMechanical SystemsMicroball BearingsActuationElectronic-mechanical SystemMicroactuatorMicro-electromechanical SystemVibration ControlDynamic Characterization