Christopher M. Waits

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Publications

Citations

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Active since

2002

Affiliations

DEVCOM Army Research Laboratory(Current)

University of Maryland, College Park

Sensors (United States)

Massachusetts Institute of Technology

Oak Ridge Associated Universities

Christopher M. Waits is an author at DEVCOM Army Research Laboratory specializing in engineering, microfabrication, and microelectromechanical systems.

Publications per year

2002–2024

Publications

Investigation of gray-scale technology for large area 3D silicon MEMS structures

Christopher M. Waits, A. Modafe, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2002 · 151 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

Christopher M. Waits, Brian Morgan, Mark Kastantin et al. · Sensors and Actuators A Physical · 2005 · 142 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

Brian Morgan, Christopher M. Waits, John Krizmanic et al. · Journal of Microelectromechanical Systems · 2004 · 136 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +17

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

Christopher M. Waits, Brian Morgan, Mark Kastantin et al. · Sensors and Actuators A Physical · 2004 · 130 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

Compact multiplexing of monodisperse electrosprays

Weiwei Deng, Christopher M. Waits, Brian Morgan et al. · Journal of Aerosol Science · 2009 · 90 citations

Engineering, Materials Engineering, Materials Science +4

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