Sensors and Actuators A Physical · 2005 · 142 citations · 0 references
EngineeringElectrical EngineeringManufacturing EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems MaterialsMems PackagingMicrofabrication ProcessesMicromachiningDeep Reactive Ion EtchingMicromachining Of Silicon WafersReactive Ion EtchingSiliconSilicon EtchingSilicon MicromachiningSilicon Microstructures