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Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
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2005
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Materials ScienceGray-scale LithographyDeep Reactive IonEngineeringMicrofabricationApplied PhysicsSilicon MemsMicroscale SystemMicromachiningNanolithography MethodMicroelectronics3D PrintingMicro-electromechanical SystemMicrofluidics
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