Publication | Closed Access

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Materials ScienceElectrical EngineeringEngineeringMicrofabricationApplied PhysicsNano Electro Mechanical SystemIntegrated Fabrication ProcessThermal IsolationSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsMicro-electromechanical System