Concepedia

Template Metrology

Template Metrology is a specialized form of dimensional and pattern fidelity assessment within microfabrication metrology that quantitatively characterizes the geometric accuracy, feature placement, and surface integrity of master templates used in replication processes such as nanoimprint lithography.

6

Publications

210

Citations

42

Authors

13

Institutions

Publications per year

2017–2026

1

Parents

Publications

6

Implementation of templated DSA for via layer patterning at the 7nm node

Roel Gronheid, Jan Doise, Joost Bekaert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 114 citations

, , +17

Advanced Lithography for Bit Patterned Media

XiaoMin Yang, Yuan Xu, Kim Lee et al. · IEEE Transactions on Magnetics · 2009 · 27 citations

, , +16

Quantifying release in step-and-flash imprint lithography

Edwin P. Chan, Alfred J. Crosby · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 20 citations

, , +17

Metrology and inspection required for next generation lithography

Masafumi Asano, Ryoji Yoshikawa, Takashi Hirano et al. · Japanese Journal of Applied Physics · 2017 · 19 citations

, , +17

HVM readiness of nanoimprint lithography templates: defects, CD, and overlay

Koji Ichimura, Kouji Yoshida, Saburo Harada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations

, , +16

1–5 of 6

Authors

42

  1. JB
    Joost Bekaert

    IMEC, Belgium

    1 publications · 114 citations

    1

    h-index

  2. JS
    J. Seekamp

    University of Wuppertal, Germany

    1 publications · 13 citations

    1

    h-index

  3. IK
    Ioannis Karageorgos

    VIB-KU Leuven Center for Microbiology, Belgium

    1 publications · 114 citations

    1

    h-index

  4. JD
    Jan Doise

    IMEC, Belgium

    1 publications · 114 citations

    1

    h-index

  5. XY
    XiaoMin Yang

    Seagate (United States), United States

    1 publications · 27 citations

    1

    h-index

1–5 of 42

Institutions

13

  1. Lund University

    Lund, Sweden

    1 h-index

    6 publications

    78 citations

  2. University of Massachusetts Amherst

    Amherst Center, United States

    1 h-index

    2 publications

    40 citations

  3. VIB-KU Leuven Center for Microbiology

    Leuven, Belgium

    1 h-index

    2 publications

    228 citations

  4. University of Duisburg-Essen

    Essen, Germany

    1 h-index

    2 publications

    26 citations

  5. VTT Technical Research Centre of Finland

    Espoo, Finland

    1 h-index

    1 publications

    13 citations

  6. Hitachi (Japan)

    Tokyo, Japan

    1 h-index

    1 publications

    114 citations

  7. Material (Belgium)

    Brussels, Belgium

    1 h-index

    2 publications

    228 citations

  8. Seagate (United States)

    Cupertino, United States

    1 h-index

    6 publications

    162 citations

1–8 of 13

Venues

  1. Microelectronic Engineering

    1 publications · 13 citations

    1

    h-index

  2. Japanese Journal of Applied Physics

    JJAP · 1 publications · 19 citations

    1

    h-index

  3. 1

    h-index

  4. 1

    h-index

  5. IEEE Transactions on Magnetics

    1 publications · 27 citations

    1

    h-index

1–5