Concepedia

Sub-10 Nanometer Patterning

Sub-10 Nanometer Patterning is a nanofabrication technique that enables the creation of physical features smaller than 10 nanometers, distinguishing itself by achieving resolution at the atomic scale necessary for advanced semiconductor and nanoscale device manufacturing.

99

Publications

9.1K

Citations

546

Authors

184

Institutions

Publications per year

2017–2026

31

Parents

Publications

99

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

, , +14

Block Copolymer Lithography: Periodic Arrays of ~10 <sup>11</sup> Holes in 1 Square Centimeter

Miri Park, Christopher Harrison, P. M. Chaikin et al. · Science · 1997 · 1.9K citations

, , +17

Direct Fabrication of Large Micropatterned Single Crystals

Joanna Aizenberg, David A. Muller, J. L. Grazul et al. · Science · 2003 · 538 citations

, , +17

Ultrahigh resolution of calixarene negative resist in electron beam lithography

Jun‐ichi Fujita, Y. Ohnishi, Yukinori Ochiai et al. · Applied Physics Letters · 1996 · 242 citations

, , +14

Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)

Walter Hu, K. Sarveswaran, Marya Lieberman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 239 citations

, , +11

1–5 of 99

Authors

546

  1. MS
    Mohammad S. M. Saifullah

    Institute of Materials Research and Engineering, Singapore

    4 publications · 83 citations

    4

    h-index

  2. JK
    Joel K. W. Yang

    Singapore University of Technology and Design, Singapore

    4 publications · 249 citations

    4

    h-index

  3. SY
    Stephen Y. Chou

    Princeton University, United States

    3 publications · 2.4K citations

    3

    h-index

  4. SM
    S. Matsui

    NEC (Japan), Japan

    3 publications · 348 citations

    3

    h-index

  5. ME
    Mark E. Welland

    University of Cambridge, United Kingdom

    3 publications · 71 citations

    3

    h-index

1–5 of 546

Institutions

184

  1. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    5 h-index

    33 publications

    1.4K citations

  2. Lawrence Berkeley National Laboratory

    Berkeley, United States

    5 h-index

    18 publications

    1.5K citations

  3. Seoul National University

    Seoul, South Korea

    4 h-index

    17 publications

    419 citations

  4. Agency for Science, Technology and Research

    Singapore, Singapore

    4 h-index

    14 publications

    400 citations

  5. Massachusetts Institute of Technology

    Cambridge, United States

    4 h-index

    15 publications

    1.6K citations

  6. University of California, Berkeley

    Berkeley, United States

    4 h-index

    17 publications

    1.6K citations

  7. Sungkyunkwan University

    Seoul, South Korea

    3 h-index

    6 publications

    119 citations

  8. Pennsylvania State University

    State College, United States

    3 h-index

    10 publications

    315 citations

1–8 of 184

Venues

  1. 8

    h-index

  2. 8

    h-index

  3. Nanotechnology

    8 publications · 379 citations

    8

    h-index

  4. Microelectronic Engineering

    7 publications · 298 citations

    7

    h-index

  5. Nano Letters

    5 publications · 288 citations

    5

    h-index

1–5