Concepedia

Sacrificial Layer Compatibility

Sacrificial Layer Compatibility is a material and process-level criterion in microfabrication that determines the chemical and thermal stability of a sacrificial layer relative to the surrounding structural materials and processing conditions, ensuring selective removal without damaging adjacent components.

8

Publications

289

Citations

34

Authors

11

Institutions

Publications per year

2017–2026

4

Parents

Publications

8

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Alvise Bagolini, L.S. Pakula, T.L.M. Scholtes et al. · Journal of Micromechanics and Microengineering · 2002 · 111 citations

, , +17

Experimental studies on sacrificial layer in conservation of earthen sites

Xudong Wang, Bo Zhang, Qiangqiang Pei et al. · Journal of Cultural Heritage · 2019 · 45 citations

, , +11

Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining

Yuji Uenishi, H. Tanaka, Hiroo Ukita · IEEE Transactions on Electron Devices · 1994 · 45 citations

, , +17

A Fast Route Towards Freestanding Single-Crystalline Oxide Thin Films by Using YBa2Cu3O7-x as a Sacrificial Layer

Yao‐Wen Chang, Ping‐Chun Wu, Jhih-Bang Yi et al. · Nanoscale Research Letters · 2020 · 24 citations · Full text

, , +17

On the use of sacrificial layer in ECDM process for form accuracy

Botcha Appalanaidu, Akshay Dvivedi · Journal of Manufacturing Processes · 2022 · 23 citations

, , +13

1–5 of 8

Authors

34

  1. HP
    H.T.M. Pham

    Australian National University, Australia

    1 publications · 111 citations

    1

    h-index

  2. FP
    F.C. Parida

    Indira Gandhi Centre for Atomic Research, India

    1 publications · 11 citations

    1

    h-index

  3. LP
    L.S. Pakula

    Delft University of Technology, Netherlands

    1 publications · 111 citations

    1

    h-index

  4. YU
    Yuji Uenishi

    NTT (Japan), Japan

    1 publications · 45 citations

    1

    h-index

  5. MM
    Matthias Muoth

    ETH Zurich, Switzerland

    1 publications · 15 citations

    1

    h-index

1–5 of 34

Institutions

11

  1. Lanzhou University

    Lanzhou, China

    1 h-index

    5 publications

    225 citations

  2. National Yang Ming Chiao Tung University

    Hsinchu, Taiwan

    1 h-index

    2 publications

    48 citations

  3. Dunhuang Research Academy

    Shazhou, China

    1 h-index

    4 publications

    180 citations

  4. National Cheng Kung University

    Tainan City, Taiwan

    1 h-index

    5 publications

    120 citations

  5. ETH Zurich

    Zurich, Switzerland

    1 h-index

    5 publications

    75 citations

  6. Delft University of Technology

    Delft, The Netherlands

    1 h-index

    6 publications

    666 citations

  7. Indian Institute of Technology Roorkee

    Roorkee, India

    1 h-index

    2 publications

    46 citations

  8. Tohoku University

    Sendai, Japan

    1 h-index

    2 publications

    30 citations

1–8 of 11

Venues

  1. IEEE Transactions on Electron Devices

    1 publications · 45 citations

    1

    h-index

  2. AIP Advances

    1 publications · 15 citations

    1

    h-index

  3. Nanoscale Research Letters

    NRL · 1 publications · 24 citations

    1

    h-index

  4. Nuclear Engineering and Design

    1 publications · 11 citations

    1

    h-index

  5. Journal of Cultural Heritage

    1 publications · 45 citations

    1

    h-index

1–5