L.S. Pakula

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Alvise Bagolini, L.S. Pakula, T.L.M. Scholtes et al. · Journal of Micromechanics and Microengineering · 2002 · 111 citations

Engineering, Mechanical Engineering, Integrated Circuits +18

Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Vladimir G. Kutchoukov, F. Laugere, W. van der Vlist et al. · Sensors and Actuators A Physical · 2004 · 77 citations

Materials Science, Nanofluidic Devices, Engineering +7

Fabrication of a CMOS compatible pressure sensor for harsh environments

L.S. Pakula, Heng Yang, H.T.M. Pham et al. · Journal of Micromechanics and Microengineering · 2004 · 75 citations

Electrical Engineering, Engineering, Harsh Environments +15

27.7 A 0.05mm<sup>2</sup> 1V capacitance-to-digital converter based on period modulation

Yuming He, Zu‐Yao Chang, L.S. Pakula et al. · 2015 · 28 citations

Electrical Engineering, Engineering, Energy Efficiency +9

Fabrication of nanofluidic devices in glass with polysilicon electrodes

Vladimir G. Kutchoukov, L.S. Pakula, Gea Oswah Fatah Parikesit et al. · Sensors and Actuators A Physical · 2005 · 17 citations

Materials Science, Polysilicon Electrodes, Engineering +4